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Aasm
Technology Singapore Pte Ltd
Contact:
2 Yishun Avenue 7
Singapore 768924
Tel: (65) 752-6311
Fax: (65) 758-2287
E-mail:
general.inquiries@asm.com
Website:
http://www.asm.com Categories:
Semiconductor, Wafer Fabrication, Electrical & Electronics Company Profile: The
Process of Innovation is more than just a tag line. It is
the ASM culture. A culture that provides for the
semiconductor manufacturer, unique production solutions for
the most advanced processing challenges.
A culture that meets
our customers' needs with cost-effective
production-ready tools. All ASM products, including
our latest 300mm tools, are designed to deliver
flexibility and reliability for true 24/7
productivity, while providing a solution for 100nm
and smaller line-width technologies. Combine this
with ASM's global presence, our innovative
engineering and pioneering tradition, and you truly
have A World of Production SolutionsSM.
By concentrating on Unique Production SolutionsSM
(UPS), ASM is prepared to respond to market requests
for the most demanding thin-film depositions in both
single wafer and batch wafer technologies. ASM's
equipment strategy already addresses applications
required for new technologies in selective epitaxy
(low temperature epitaxy); advanced gate stack;
silicon-germanium; hemispherical silicon grain (HSG);
thin oxide; the Aurora 2.7 low-k dielectric, as well
as etch-stop layer for copper metalization, and
Atomic Layer Chemical Vapor Deposition (ALCVD) for
the most demanding, conformal, pinhole-free,
ultra-thin film deposition.
From high-k dielectric to polysilicon-germanium and
atomic layer deposition, ASM has the processes
needed for the products of the 21st century. ASM's
process solutions, along with its elevated
source/drain structure, silicon-nitride and
polysilicon-germanium, offer an answer for gate
stack and source/drain contacts. The SiGeC process
is very useful for controlling boron diffusion in
the gate electrode. The Epsilon and Polygon products
provide the hardware for some of these applications.
Beyond the cost of ownership advantage ASM
traditionally provides, the above are some examples
of why ASM is the partner of choice for your most
advanced technologies.
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